Patent holdings for IPC class G03F 1/02

Total number of patents in this class: 5

10-year publication summary

0
0
0
0
0
0
0
0
0
0
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
6816
2
Canon Inc.
36841
1
Miraclon Corporation
68
1
Kinoptics Technologies Inc.
2
1
Other owners 0